FUNDAMENTALS OF  ION IMPLANTATION and RTP


This 1 day course  is designed to provide a sound foundation in the fundamentals of ion implantation and RTP used today in integrated circuit fabrication. 


Topics include:

• Overview
  

• Ion Beams
  

• Ion Implantation process and applications
  

• Ion Implantation concepts and terminology
  

• Basic Ion Implantation system architecture
  

• Cryogenic Ion Implantation
  

• Principles of operation
  

• Ion Implantation process issues
  

• Contamination issues and control
  

• Applications:
  

• Ion Implantation safety issues
  

Who Should Attend:

Process engineers, R&M technicians, equipment engineers, product engineers, tool application and sales engineers

Next Schedule Date and Location:
Only offer at clients site

Price: $8,900 USD for up to 14 students


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