Overview of Photolithography
This 1 day course is designed to provide a sound foundation in the fundamentals of photolithography used today in integrated circuit fabrication.
Outline of Topics:
I. Introduction
Importance of photolithography in semiconductor manufacturing
II. Applications of Photolithography
Introduction to photolithography applications
Overview of the photolithography process in the semiconductor industry
Applications of photolithography in the manufacturing of electronic devices
III. Tool Architecture
Overview of photolithography tools
Components of a photolithography tools
Tool architecture and its importance in photolithography
IV. Types of Photolithography
Projection Alignment Lithography
Immersion Lithography
Lithography Steppers and Scanners
Extreme UV Lithography
V. Types of Photoresist
Positive and Negative Photoresist
Advantages and Disadvantages of Positive and Negative Photoresist
Applications of Photoresist
VI. Exposure and Development
Fundamentals of Light
Exposure systems and their applications in photolithography
Introduction to photo masks
VII. Optics Used in Photolithography Tools
Overview of Optics in Photolithography Tools
Types of Optics Used in Photolithography Tools
VIII. Photolithography Issues
Introduction to Photolithography Issues
Common Issues in Photolithography
Methods for Overcoming Photolithography Issues
IX. The Future of Lithography
The Current State of Lithography
The Future of Lithography
New Technologies in Lithography
X. Conclusion
Overview of the Photolithography Process
Importance of Photolithography in the Semiconductor Industry
Conclusion and Key Takeaways
Who Should Attend:
Employees new to the industry or those who have in-depth knowledge of a specialty area will benefit by broadening their semiconductor photolithography knowledge. tool vendors who design, market and sale semiconductor tools, process and quality engineering, field service, process operators, equipment engineers and product engineers will find this course valuable.
Next Schedule Date and Location:
TBD
Price:$995 USD per person (10% discount if 3 or more students attend the same event from the same company)
On-site Price: $10900 for the first 20 attendees and additional fee for each attendee over the first 20 of $295
To Register: Click here