Fundamentals of ALD, ALE, and Precursors Chemistries

Course Overview

Discover how atomic-scale precision is revolutionizing semiconductor manufacturing with Atomic Layer Deposition (ALD) and Etching (ALE). This course provides a practical introduction to Atomic Layer Deposition, an essential technique in semiconductor manufacturing.

You'll learn about ALD foundational concepts including growth, advantages, measurements, and more, chemical precursors for use in ALD, selected ALD processes, area-selective deposition, and atomic layer etching. Overall, the applications and chemistry used in semiconductor processing as it relates to ALD and ALE are heavily discussed.

Learning Objectives

Course Topics

Who Should Attend

Professionals in the semiconductor industry who want to understand ALD technology and chemistry used in ALD and ALE. This course may especially benefit those who are directly working with precursor gases used in ALD and ALE processing, including gas and equipment providers.

Prerequisites

Basic understanding of semiconductor manufacturing processes and thin film deposition techniques is recommended.