Network Analyzer, Z’Scan RF Sensor, and PicoScope Training
The goal of this course is to teach the audience how to actively use advanced RF instruments in a fab setting to measure plasma tools and chambers, diagnose issues, and correct tool problems. Upon completing training, the technician should be able to verify—from an RF power standpoint—that a problem has been resolved and the tool is ready for production testing.
When finished with this course, students will be fluent in RF terminology as it relates to RF power delivery to plasmas. They will be able to communicate RF troubleshooting actions convincingly using common language to coworkers and managers, presenting data in a manner that drives decisive action, such as garnering needed resources or bolstering maintenance procedures.
Equipment engineers and technicians who intend to actively use RF instruments for intensive design, troubleshooting, and repair verification in a fab environment.
Attendees must have completed the RF Power Delivery for Plasma Systems course prior to enrolling. Basic experience with oscilloscopes is advantageous.
Because this course is limited to people who will actively use measurement devices for intensive repair verification, the class size is strictly capped at up to 4 attendees.
The day consists of a short lecture followed by a lot of hands-on lab time. Teams of two students will execute computer and equipment setup, practical instrument use, and intensive data collection exercises.
At the end of the training course, our instructors can go into your facility and take measurements on your tools. This optional day is designed to help users move knowledge from 'theory' to 'practical' by applying measurement technologies to real machines and troubleshooting your actual problem tools.