Course Overview
This 3-day course provides a practical, immediately usable knowledge of the techniques and methods for effective operation of vacuum systems used in the semiconductor fab. The attendee will first gain an understanding of the basics of vacuum; how gas behaves at low pressure, how vacuum levels are categorized, how the various units of pressure and flow are used and converted.
A detailed understanding of the operation of common vacuum pumps, gauges, and other critical components is gained through animated graphics and hands-on demonstrations. Becoming familiar with a Residual Gas Analyzer (RGA) and knowing how it is used to monitor and diagnose the system is a key benefit for the participant in this course.
What the Course Covers
Introduction to Vacuum
- Basics of vacuum and how gas behaves at low pressure
- How vacuum levels are categorized
- Units of pressure and flow conversion
- Gas Flow and Pressure Regimes
Vacuum Pumps and Gauges
- Operation of common vacuum pumps
- Vacuum Gauges operation and selection
- Critical components understanding through animated graphics
- Hands-on demonstrations
System Analysis and Diagnostics
- Residual Gas Analyzer (RGA) operation
- System monitoring and diagnosis techniques
- Evaluating System Performance (RGA, pump-down, and leak-up)
- Troubleshooting methodologies
Gas Delivery Systems
- Process gas delivery understanding
- Gas Box Operation and Flow Control
- Pressure regulator operation
- Flow controller operation
Maintenance and Care
- Cleaning and Conditioning of Vacuum Components
- Care and Maintenance of Pumps and Vacuum Systems
- Determination of crossover pressure and interlocks
- Review of seals, fluids and greases
Problem Detection and Resolution
- Leak Detection and Correction
- Outgassing issues and solutions
- Water contamination problems and amelioration techniques
- Diagnosing and Solving Contamination Problems
- System leak, outgassing, and permeation detection
System Operation
- Operation of Vacuum Systems
- Crossover pressure management
- Interlocks, safety, and documentation
- Methods for analyzing system pump-down
- Monitoring and trouble-shooting techniques
Learning Outcomes
Through hands-on activities, this course will develop the attendee's skill set to effectively prevent, predict, and diagnose system problems related to the vacuum environment. Students will gain practical, immediately usable knowledge for effective operation and maintenance of vacuum systems.
Who Should Attend
- R&M Technicians
- Equipment Engineers
- Process Techs