X-Ray Photoelectron Spectroscopy

Professional semiconductor training with 46+ years of industry expertise

Course Overview

XPS is used to determine the atoms present at a surface and their concentrations, chemistry, and lateral and depth distributions. This is a 2-day course.

What the Course Covers

Introduction and Fundamentals

  • Terminology, Surfaces, Types of Surfaces
  • The principles of XPS
  • Production of Photoelectrons, Peak Labeling
  • Electronic Configuration of Atoms, Atoms, Molecules, Solids
  • Energy, Spectra, Auger Process
  • Valence Spectra, Surface Sensitivity, Information Depth
  • Sample Handling

Spectral Features and Analysis

  • Spin-Orbit Splitting
  • Chemical Shift
  • Plasmons
  • Multiplet Splitting
  • Shake-up

Instrumentation

  • Dual Anode
  • Bremsstrahlung
  • Monochromatic Source
  • Electron Energy Analyzers
  • Spectrum Acquisition
  • Energy Resolution
  • Scattering in Analyzers
  • Electron Detectors
  • Pulse Counting
  • Position Sensitive Detectors

Small Area Analysis and Imaging

  • Small Area Analysis
  • Area Location
  • Imaging XPS
  • Methods, Equipment and Examples
  • Vacuum System Samples

Qualitative Analysis

  • Energy Scale Calibration
  • Identification of Elements
  • Changing X-Ray sources
  • Charging
  • Interpretation of Chemical Shift
  • Relaxation Effects
  • Auger Parameter
  • Peak Widths, Lineshapes

Quantitative Analysis

  • Sensitivity Factors
  • Ionization Cross Section
  • Asymmetry Parameter
  • Analyzer Transmission
  • Reference Spectra
  • Intensities
  • Background Subtraction
  • Detection Limit
  • Effect of Thin Overlayers

Artifacts and Data Processing

  • X-Ray Damage
  • Charging, Methods for Charge Control
  • Ghost Peaks
  • Data Acquisition and Processing
  • Processing Data
  • Tougaard Background Subtraction
  • Satellite Subtraction
  • Peak Area, Lineshapes
  • Curve Fitting, Deconvolution
  • Depth Profiling

Who Should Attend

Scientists, Engineers, Technicians, and Students who would like a detailed understanding of the use of x-ray photoelectron spectroscopy (XPS/ESCA) for surface analysis.

Ready to Register?

$13,900 USD

For up to 14 students (2 Days)

Register Now
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Duration
2 Days
👥
Format
On-site Training

Need More Information?

Phone: 636-343-1333

Email: heather@pti-inc.com