Atomic Level Deposition (ALD) Course Outline

I. Introduction to Atomic Layer Deposition (ALD)

 A. Definition of ALD

B. Purpose of ALD in Semiconductor Manufacturing

II. ALD Tool Architecture

A. Types of ALD Tools

B. Overview of Tool Components and Operation

III. Gases Used in ALD

A. Types of ALD Precursor Gases

B. Properties of ALD Precursor Gases

C. Gas Delivery Systems and Flow Control

IV. Operation of ALD

A. Overview of ALD Process Flow

B. Steps Involved in ALD Process

C. Key Considerations and Best Practices

V. Control of ALD

A. Overview of ALD Process Parameters

B. Control Techniques for ALD Process Stability and Repeatability

VI. Applications of ALD in Semiconductor Manufacturing

A. ALD for Film Deposition

B. ALD for Device Fabrication

C. ALD for Advanced Packaging

VII. Process Issues and Defects in ALD

A. Common ALD Process Issues

B. Defects Caused by ALD

C. Strategies for Defect Prevention and Mitigation

VIII. ALD Tool Makers

A. Major ALD Tool Providers

B. Comparison of ALD Tool Technologies

IX. Future Advancements in ALD

A. Emerging ALD Technologies and Trends

B. Potential Applications of ALD in Semiconductor Manufacturing

Target Audience:

This course is designed for process engineers, technicians, and production personnel involved in semiconductor manufacturing.

Learning Outcomes: By the end of this course, participants should have a solid understanding of the following:

The fundamentals of atomic layer deposition (ALD) and its importance in semiconductor manufacturing

The architecture and operation of ALD tools

The gases used in ALD and their properties
The operation and control of the ALD process

The various applications of ALD in semiconductor manufacturing

Common process issues and defects caused by ALD and strategies for prevention and mitigation

The major ALD tool providers and comparison of ALD tool technologies


Emerging ALD technologies and trends in semiconductor manufacturing.



Schedule: We only offer this course on-siteFundamentals of Atomic Level Deposition


​Price: $10,900 USD for the first 20 attendees